Investigation on the optical properties of sulfur-doped diamond thin films

Yongjie Wang; Qingxun Zhao; Zengqian Yin; Zhanlong Zhao

doi:10.1117/12.900241

8 September 2011 Investigation on the optical properties of sulfur-doped diamond thin films

Yongjie Wang, Qingxun Zhao, Zengqian Yin, Zhanlong Zhao

Proceedings Volume 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications; 819320 (2011) https://doi.org/10.1117/12.900241
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

Sulfur-doped diamond thin films have been synthesized using CH₄/H₂/Ar/H₂S gas mixture by hot filament chemical vapor deposition (HFCVD) technique. The optical properties of the films are investigated by SEM and Raman spectra. The Gaussian line shape is used in the curve fitting for the Raman spectra. Results show that the I_D/I_G presents the trend of first increase and then decrease with the increase of S/C ratio, however, an upward shift of the diamond peak is observed. This implies residual stress in the sulfur-doped diamond thin films. Moreover, optimum experimental conditions are proposed.

Citation Download Citation

Yongjie Wang, Qingxun Zhao, Zengqian Yin, and Zhanlong Zhao "Investigation on the optical properties of sulfur-doped diamond thin films", Proc. SPIE 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, 819320 (8 September 2011); https://doi.org/10.1117/12.900241

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