Dr. Yasushi Washio Profile

Dr. Yasushi Washio

at Tokyo Ohka Kogyo Co Ltd

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Publications (2)

Proceedings Article | 3 April 2010 Paper

A novel lithography process for 3D (three-dimensional) interconnect using an optical direct-writing exposure system

T. Azuma, M. Sekiguchi, M. Matsuo, A. Kawasaki, K. Hagiwara, H. Matsui, N. Kawamura, K. Kishimoto, A. Nakamura, Y. Washio

Proceedings Volume 7637, 76371O (2010) https://doi.org/10.1117/12.846013

KEYWORDS: Optical alignment, Semiconducting wafers, Lithography, Wafer-level optics, Reflectivity, Infrared imaging, Semiconductors, Microfabrication, Chemically amplified resists, Photoresist processing

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Proceedings Article | 4 May 2005 Paper

Multilayer ultra thick resist development for MEMS

Yasushi Washio, Takahiro Senzaki, Yasuo Masuda, Koji Saito, Hiroyuki Obiya

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.600227

KEYWORDS: Plating, Microelectromechanical systems, Optical lithography, Photoresist processing, Etching, Multilayers, Coating, Semiconducting wafers, Nickel, Manufacturing

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