Computational lensless metrology of freeform optics: large-area optical testing with nanometre-scale precision

Tianbo Wang

doi:10.1117/12.3001887

13 March 2024 Computational lensless metrology of freeform optics: large-area optical testing with nanometre-scale precision

Tianbo Wang

Author Affiliations +

Proceedings Volume PC12857, Computational Optical Imaging and Artificial Intelligence in Biomedical Sciences; PC128570B (2024) https://doi.org/10.1117/12.3001887
Event: SPIE BiOS, 2024, San Francisco, California, United States

Abstract

Characterizing wavefront of free-form optical elements is challenging. Existing interferometric techniques are accurate but not suitable for freeform elements. We propose a computational metrology technique using a coded sensor to capture diffraction measurements. Our calibration process achieves remarkable accuracy with less than 10 nm error over a 40 mm² field of view. This technique allows water-immersion operation and can characterize steep surfaces with up to 30 degrees slope. With a large field of view, nanometer precision, and a non-interferometric configuration, it has the potential to revolutionize optical metrology in manufacturing.

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Tianbo Wang "Computational lensless metrology of freeform optics: large-area optical testing with nanometre-scale precision", Proc. SPIE PC12857, Computational Optical Imaging and Artificial Intelligence in Biomedical Sciences, PC128570B (13 March 2024); https://doi.org/10.1117/12.3001887

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KEYWORDS

Metrology

Optical testing

Freeform optics

Manufacturing

Optical components

Wavefronts

Sensors

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