Instantaneous Phase Measuring Interferometry

R. Smythe; R. Moore

doi:10.1117/12.936335

15 November 1983 Instantaneous Phase Measuring Interferometry

R. Smythe, R. Moore

Proceedings Volume 0429, Precision Surface Metrology; (1983) https://doi.org/10.1117/12.936335
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

Conventional phase measuring interferometry normally requires one-half to sixty seconds acquisition time, limiting measurement to stationary phenomenon such as optical element wavefronts. We have developed an instantaneous PMI that measures displacements at one point to a resolution of 0.003 microns. We will describe this instrument and an interferometer measuring phase to lambda/2000 with a measurement aperture of less than one microsec. Also described is an attached system for analysing and displaying wavefronts at up to 10 Hz.

Citation Download Citation

R. Smythe and R. Moore "Instantaneous Phase Measuring Interferometry", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); https://doi.org/10.1117/12.936335

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