Photothermal Deflection Analysis Of Uv Optical Thin Films

A. Schmid; D. Smith; M. Guardalben; J. Abate

doi:10.1117/12.942583

15 August 1984 Photothermal Deflection Analysis Of Uv Optical Thin Films

A. Schmid, D. Smith, M. Guardalben, J. Abate

Author Affiliations +

Proceedings Volume 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers; (1984) https://doi.org/10.1117/12.942583
Event: 1984 Technical Symposium East, 1984, Arlington, United States

Abstract

This paper offers a status report of photothermal-deflection microscopy applied to defect analysis in UV dielectric thin films. Absorption maps obtained by this technique from such films are presented and detection limits are discussed. A comparison with other relevant observations such as laser damage is being undertaken.

Citation Download Citation

A. Schmid, D. Smith, M. Guardalben, and J. Abate "Photothermal Deflection Analysis Of Uv Optical Thin Films", Proc. SPIE 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers, (15 August 1984); https://doi.org/10.1117/12.942583

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