Present And Future Applications For Laser Processing Of Hybrids And Semiconductors

Edward J. Swenson

doi:10.1117/12.946394

30 September 1985 Present And Future Applications For Laser Processing Of Hybrids And Semiconductors

Edward J. Swenson

Proceedings Volume 0527, Applications of High Power Lasers; (1985) https://doi.org/10.1117/12.946394
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States

Abstract

Present and future development of laser processing as a production technique for modifying semiconductor devices, improving yields, and decreasing developmbnt times are described. Current applications covered include thick-and thin-film resistor trimming, deposited film and polysilicon resistors on silicon trimming and redundant memory repair. Emerging applications include microcircuit mask making and capacitor trimming. Examples of processes still under development include selective annealing, minority-carrier lifetime doping, and device diagnostics by laser imaging.

Citation Download Citation

Edward J. Swenson "Present And Future Applications For Laser Processing Of Hybrids And Semiconductors", Proc. SPIE 0527, Applications of High Power Lasers, (30 September 1985); https://doi.org/10.1117/12.946394

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