Production Applications Of Laser Microchemistry

D. C. Shaver; L. A. Stern; N. P. Economou; D. J. Ehrlich

doi:10.1117/12.940394

1 September 1987 Production Applications Of Laser Microchemistry

D. C. Shaver, L. A. Stern, N. P. Economou, D. J. Ehrlich

Proceedings Volume 0774, Lasers in Microlithography; (1987) https://doi.org/10.1117/12.940394
Event: Microlithography Conferences, 1987, Santa Clara, CA, United States

Abstract

Cutting of conductors using laser-induced chemical etching as well as deposition of conducting links by laser photolysis have been demonstrated. These operations form the basis for a laser microchemistry tool useful for repair or modification of microcircuits. With our prototype system, we have been able to photolytically deposit conducting lines with resistivities of 250 μohm-cm. Because the process is photolytic, deposition can be initiated even over transparent areas, and film growth is well controlled.

Citation Download Citation

D. C. Shaver, L. A. Stern, N. P. Economou, and D. J. Ehrlich "Production Applications Of Laser Microchemistry", Proc. SPIE 0774, Lasers in Microlithography, (1 September 1987); https://doi.org/10.1117/12.940394

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