Fabrication of grating-Fresnel lens by using PDMS based soft lithography

Kai Ni; Haifei Hu; Xinghui Li; Qian Zhou; Xiaohao Wang; Jinchao Zhang

doi:10.1117/12.2246054

31 October 2016 Fabrication of grating-Fresnel lens by using PDMS based soft lithography

Kai Ni, Haifei Hu, Xinghui Li, Qian Zhou, Xiaohao Wang, Jinchao Zhang

Proceedings Volume 10022, Holography, Diffractive Optics, and Applications VII; 100220U (2016) https://doi.org/10.1117/12.2246054
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

Fabrication of a new type hybrid plane optics, Grating-Fresnel (G-Fresnel) lens for miniature spectrometer is presented in this research. A polydimethylsiloxane (PDMS) based soft lithography technology is employed. In this method, the grating surface and Fresnel surface of the G-Fresnel lens are formed simultaneously by sandwiching the PDMS layer between a reverse Fresnel mold and a grating. Surface anti-adhesive treatment method has been proposed to solve the innate adhesion of PDMS layers. A fabrication system is constructed and a G-Fresnel with grating line spacing of 1.11μm (900 lines/mm) and Fresnel lens with a diameter of 25.4 mm and a focal length of 25 mm was successfully fabricated. Three-dimensional surface profilometry has been performed to examine the device quality. Measured results show that replicas remain high fidelity to its primary master mold. A miniature spectrometer system was constructed to evaluate the performances of this fabricated G-Fresnel lens. Experimental results show that the spectrometer can provide about 2 nm resolutions at wavelengths of 450nm, 532 nm, and 650 nm, which verified the effectiveness of this fabrication method.

Citation Download Citation

Kai Ni, Haifei Hu, Xinghui Li, Qian Zhou, Xiaohao Wang, and Jinchao Zhang "Fabrication of grating-Fresnel lens by using PDMS based soft lithography", Proc. SPIE 10022, Holography, Diffractive Optics, and Applications VII, 100220U (31 October 2016); https://doi.org/10.1117/12.2246054

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