Performance analysis of three-dimensional surface profilometry using a MEMS mirror

Yuxin Cheng; Sining Li; Guohang Shan

doi:10.1117/12.2254870

24 November 2016 Performance analysis of three-dimensional surface profilometry using a MEMS mirror

Yuxin Cheng, Sining Li, Guohang Shan

Proceedings Volume 10023, Optical Metrology and Inspection for Industrial Applications IV; 100230D (2016) https://doi.org/10.1117/12.2254870
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

Accurate 3-D shape measurement has played an increasingly important role in various diverse industrial applications, such as manufacturing, robot vision etc. To achieve a low cost, compact 3D profiling system, a phase shifting scheme with a single MEMS scanner has been proposed and studied by some international colleagues. In this paper, we establish mathematical model for the 3D profiling system to reconstruct surface contour of the object. A data processing flow chart is designed, and the algorithm is developed correspondingly, in which some means to improve accuracy are also taken into consideration. Then, numerical simulation for the whole work process of the profiling system is performed according to the theoretical model. The simulation results are analyzed in detail to get the optimal parameters. In order to verify the feasibility of the scheme, we build an experimental setup and carry out a series of experiments. The results show that the RMSE is about 6% and the range resolution is about a few millimeters.

Citation Download Citation

Yuxin Cheng, Sining Li, and Guohang Shan "Performance analysis of three-dimensional surface profilometry using a MEMS mirror", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230D (24 November 2016); https://doi.org/10.1117/12.2254870

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KEYWORDS

Microelectromechanical systems

Mirrors

Fringe analysis

3D metrology

Phase shift keying

Phase shifting

Mathematical modeling

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