Full-field 3D shape measurement of specular surfaces by direct phase to depth relationship

Zonghua Zhang; Yue Liu; Shujun Huang; Zhenqi Niu; Jiao Guo; Nan Gao; Feng Gao; Xiangqian Jiang

doi:10.1117/12.2246144

24 November 2016 Full-field 3D shape measurement of specular surfaces by direct phase to depth relationship

Zonghua Zhang, Yue Liu, Shujun Huang, Zhenqi Niu, Jiao Guo, Nan Gao, Feng Gao, Xiangqian Jiang

Proceedings Volume 10023, Optical Metrology and Inspection for Industrial Applications IV; 100230X (2016) https://doi.org/10.1117/12.2246144
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

This paper presents a new Phase Measuring Deflectometry (PMD) method to measure specular object having discontinuous surfaces. A mathematical model is established to directly relate absolute phase and depth, instead of phase and gradient. Based on the model, a hardware measuring system has been set up, which consists of a beam splitter to change the optical path, and two LCD screens to display the same sinusoidal fringe patterns. By using model-based and machine vision method, system calibration is accomplished to provide the required parameters and conditions. The verification tests are given to evaluate the effectiveness of the developed system. The 3D shape of an artificial step having multiple specular surfaces and a concave mirror has been measured. Initial experimental results show that the proposed measurement method can obtain 3D shape of specular objects with discontinuous surface effectively.

Citation Download Citation

Zonghua Zhang, Yue Liu, Shujun Huang, Zhenqi Niu, Jiao Guo, Nan Gao, Feng Gao, and Xiangqian Jiang "Full-field 3D shape measurement of specular surfaces by direct phase to depth relationship", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230X (24 November 2016); https://doi.org/10.1117/12.2246144

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