Paper
9 January 2017 Fiber Bragg grating-based temperature sensor for neutral gas in capacitively coupled plasmas
Zigeng Liu, Daoman Han, Xinpu Zhang, Yongxin Liu, Wei Peng, Younian Wang
Author Affiliations +
Abstract
A fiber Bragg grating (FBG) has been utilized in capacitively coupled plasmas (CCP) for thermometry of neutral gas. We studied the effects of high frequency and low frequency power on radial distribution of neutral gas temperature. The result shows that the neutral gas temperature increases with increasing high frequency power. However, the presence of low frequency power will decrease the neutral gas temperature. Particularly, we eliminated the effect of ion bombardment on temperature measurement by studying axial distribution near plasma–sheath boundary. With features of immune to electromagnetic interference, high precision, and spatial resolving power, the FBG is a commendable candidate for CCP or other radio-frequency plasmas thermometry in both laboratory and industry.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zigeng Liu, Daoman Han, Xinpu Zhang, Yongxin Liu, Wei Peng, and Younian Wang "Fiber Bragg grating-based temperature sensor for neutral gas in capacitively coupled plasmas", Proc. SPIE 10025, Advanced Sensor Systems and Applications VII, 1002502 (9 January 2017); https://doi.org/10.1117/12.2245819
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Cited by 1 scholarly publication and 1 patent.
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KEYWORDS
Fiber Bragg gratings

Plasmas

Protactinium

Electrodes

Head

Temperature metrology

Ions

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