With the development of high average power, high repetition rate, industrial ultrafast lasers, it is now possible to achieve a high throughput with femtosecond laser processing, providing that the operating parameters are finely tuned to the application. Femtosecond lasers play a key role in these processes, due to their ability to high quality micro processing. They are able to drill high thickness holes (up to 1 mm) with arbitrary shapes, such as zero-conicity or even inversed taper, but can also perform zero-taper cutting. A clear understanding of all the processing steps necessary to optimize the processing speed is a main challenge for industrial developments. Indeed, the laser parameters are not independent of the beam steering devices. Pulses energy and repetition rate have to be precisely adjusted to the beam angle with the sample, and to the temporal and spatial sequences of pulses superposition. The purpose of the present work is to identify the role of these parameters for high aspect ratio drilling and cutting not only with experimental trials, but also with numerical estimations, using a simple engineering model based on the two temperature description of ultra-fast ablation. Assuming a nonlinear logarithmic response of the materials to ultrafast pulses, each material can be described by only two adjustable parameters. Simple assumptions allow to predict the effect of beam velocity and non-normal incident beams to estimate profile shapes and processing time.
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