Author Affiliations +
Honggoo Lee,1 Sangjun Han,1 Jaeson Woo,1 Junbeom Park,1 Changrock Song,1 Fatima Anis,2 Pradeep Vukkadala,2 Sanghuck Jeon,3 DongSub Choi,3 Kevin Huang,2 Hoyoung Heo,2 Mark D. Smith,2 John C. Robinson2
1SK Hynix, Inc. (Korea, Republic of)
2KLA-Tencor Corp. (United States)
3KLA-Tencor Korea (Korea, Republic of)