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The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. Additional papers and presentation recordings may be available online in the SPIE Digital Library at SPIEDigitalLibrary.org. The papers reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from these proceedings: Author(s), “Title of Paper,” in Smart Sensors, Actuators, and MEMS VIII, edited by Luis Fonseca, Mika Prunnila, Erwin Peiner, Proceedings of SPIE Vol. 10246 (SPIE, Bellingham, WA, 2017) Seven-digit Article CID Number. ISSN: 0277-786X ISSN: 1996-756X (electronic) ISBN: 9781510609938 ISBN: 9781510609945 (electronic) Published by SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA Telephone +1 360 676 3290 (Pacific Time) · Fax +1 360 647 1445 Copyright © 2017, Society of Photo-Optical Instrumentation Engineers. Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $18.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA 01923. Payment may also be made electronically through CCC Online at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is 0277-786X/17/$18.00. Printed in the United States of America. Publication of record for individual papers is online in the SPIE Digital Library.
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AuthorsNumbers in the index correspond to the last two digits of the seven-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first five digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc. Ahopelto, Jouni, 0L, 0Z Alayo, Nerea, 0S Alcacer, Albert, 0H Aldea, C., 10 Alejandre, Alvaro, 17 Ali, Amir R., 1C Alvarez, M., 0P Alves, Fabio, 0I Ansari, M. Zahid, 1B Ayerdi, I., 1G Baldi, A., 0G Baltrusaitis, Valentinas, 1E Baraket, Abdoullatif, 0H Baumann, R. R., 0F Bausells, Joan, 0H Becker, Th., 0X Behlert, R., 0A Bellido, J. C., 06 Benito-Altamirano, I., 1F Bernhardt, George P., 0Q Bertke, Maik, 0C, 0K Biehl, Saskia, 0O Bierer, B., 0D Boix, G., 0G Brand, Uwe, 0J Brunius, Alfredas, 1E Calaza, C., 0Y Casals, O., 1F Castaño, E., 1G Castro-Hurtado, I., 1G Cekas, Elingas, 1E Celma, S., 10, 18 Chiabrera, Francesco, 0S Ciarpi, Gabriele, 12 Dehe, Alfons, 08 Dehnert, Jan, 0B Díaz-González, M., 0G Díaz-Molina, A., 06 Dinc, C., 0D Donmez, I., 0Y Donoso, A., 06 Dragoi, V., 1H Drbohlavová, Jana, 1A Dura, Georg, 0T Dura, O. J., 0N Erian, Abanoub M., 1C Errachid, Abdelhamid, 0H Escudero, P., 0P Evans, J. W., 0X Fàbrega, C., 1F Faller, Lisa-Marie, 11 Felemban, Shifa, 0B Fernández-Sánchez, C., 0G Fiala, P., 14 Fonseca, L., 0Y Frischmuth, Tobias, 0R Funke, Benedikt, 0T Gabriel, G., 0F Gad, Alaaeldin, 0C Gadea, G., 0Y Gao, H., 0D Gao, Sai, 0J Garbayo, Iñigo, 0S Garcia-Bosque, M., 18 Giannetti, Filippo, 1J Gimeno, C., 10 Gomez-Aranzadi, M., 1G Goridko, Vadim, 0B Grigoras, Kestutis, 0L, 0Z Grille, Thomas, 0R Grönberg, Leif, 0Z Guobiene, Asta, 1E Gupta, Vijay Kumar, 1B Gutiérrez-Sánchez, G., 0N Hadas, Zdenek, 0W, 19 Haldkar, Rakesh Kumar, 1B Halvorsen, Einar, 0U Hamdana, Gerry, 0K Heinzel, Angelika, 0T Hernando-García, J., 04, 0N Hiller, Karla, 0J Hubálek, Jaromír, 1A Hwang, Seung Yong, 1L Jackson, Nathan, 0V, 17 Janusas, Giedrius, 1E Jo, Soyeon, 1L Karunasiri, Gamani, 0I Kim, Gi Won, 1L Kiziroglou, M. E., 0X Koh, Eunjung, 1L Kwon, Na Young, 1L Lad, Robert J., 0Q Le, Cuong Phu, 0U Lee, Kwang Ho, 1L Letzkus, Florian, 0T Li, Xiaojing, 0C Li, Zhi, 0J Llobet, Eduard, 1A López de la Torre, M. A., 0N Mandayo, G. G., 1G Manione, Roberto, 1K Manz, Johannes, 08 Marcon, P., 14 Márik, Marian, 1A Martinez-Calderón, M., 1G Mathewson, Alan, 0V Meyer-Kornblum, Eike, 0O Moore, Eric, 0B Morata, A., 0Y Moya, A., 0F Olaizola, S. M., 1G Olszewski, Oskar, 0V, 17 O’Murchu, Cian, 0V Orta, Adil Han, 07 Paetsch, Nancy, 0O Palevicius, Arvydas, 1E Palzer, S., 0D Pannek, C., 1F Parellada-Monreal, L., 1G Park, Eun Kyeong, 1L Park, Jihyun, 1L Park, Sujin, 1L Peiner, Erwin, 0C, 0K Pérez, A., 18 Pfusterschmied, G., 04, 1I Pilaski, Moritz, 0T Plachta, Kamil, 16 Pozzi, Michele, 09 Prades, J. D., 1F Prunnila, Mika, 0L, 0Z Ramon, E., 0F Rebhan, B., 1H Rodríguez, A., 1G Romano-Rodríguez, A., 1F Roubal, Z., 14 Royo, G., 10, 18 Rubes, Ondrej, 0W, 19 Ruiz, D., 06 Ruiz-Díez, Victor, 04, 0M, 0N, 1I Sakalys, Rokas, 1E Salleras, M., 0Y Samur, Evren, 07 Sánchez-Azqueta, C., 10, 18 Sánchez-Rojas, J. L., 04, 06, 0M, 0N, Saponara, Sergio, 12, 1J Schmid, U., 04, 0R, 0X, 1I Schmitt, K., 1F Schneider, Michael, 0R Schrag, Gabriele, 08, 0A Schwarz, P., 0M Seidel, H., 0M Šetka, Milena, 1A Sgardelis, Pavlos, 09 Shchepetov, Andrey, 0L Sheorey, Tanuja, 1B Shepeta, A. P., 13 Shokry, Kirelloss, 1C Sigmund, O., 06 Smilek, J., 19 Song, Ha Jeong, 1L Sorokin, A. V., 13 Sowade, E., 0F Stewart, David M., 0Q Streklas, Angelos, 0H Sun, Shen-Huei, 0T Swan, William, 0I Szabo, Z., 14 Tarancón, Albert, 0S, 0Y Tarantik, K., 1F Tijero, Maria, 0B Timofeev, Andrey V., 0L Toledo Serrano, J., 04, 0M, 1I Truong, Binh Duc, 0U Vallejos, Stella, 1A Varpula, Aapo, 0L Vazquez, Patricia, 0B Villa, R., 0F, 0P Wachutka, G., 0A Wartmann, Jens, 0T Wasisto, Hutomo Suryo, 0C, 0K Wöllenstein, J., 0D, 1F Wollschläger, Nicole, 0J Wright, P. K., 0X Wu, Wenze, 0K Xu, Jiushuai, 0C Yeatman, E. M., 0X Yeste, J., 0P Yilmaz, Cetin, 07 Zangl, Hubert, 11 Zea, M., 0F Zhang, Xianghui, 0J Zhou, Hao, 0C Zine, Nadia, 0H Conference CommitteesSymposium Chair Symposium Co-chairs
Symposium Local Co-chair Conference Chair Conference Co-chairs
Executive Organising Committee
Conference Programme Committee
Session Chairs
IntroductionThe SPIE Sensors, Actuators, and MEMS VIII conference took place in Barcelona within the 2017 edition of the SPIE Microtechnologies event. It gave coverage to a wide breadth of topics with quite a few interlinks among them. Sessions on materials and processing, modeling and simulation, chemical and biochemical sensors, physical sensors, energy devices, and interfacing and systems issues followed for three intense days covering the full food chain of microdevices. Remarkably enough, most of the talks were given by young researchers. In terms of microtechnologies, silicon technologies, printing technologies, and hybrid technologies were considered making use of both silicon and non-silicon materials. In terms of applications, the devices considered were thought to contribute to increasing environmental smartness, and to nurturing wearables or IoT nodes. This conference program suited well the overall goal of the SPIE Microtechnologies event, completing the scope of other concurrent conferences: it went a step further into devices than the Nanotechnology VIII conference and complemented the type of devices envisioned in the Bio-MEMS and Medical Microdevices III conference. Moreover, the Sensors, Actuators, and MEMS VIII program also complemented very well with the SPIE Microtechnologies plenary talks, which dealt with graphene technologies as an enabling material for bioelectronics, MEMS microphone innovations which is an outstanding market success of a silicon microdevice, and the energy efficiency challenge of smart microsystems which illustrated the system-wise energy challenges of making sensor nodes deployable in IoT scenarios in an effective and sustainable way. Extended abstracts of most of the presented works at Sensors, Actuators and MEMS VIII have found their way into this SPIE proceedings volume, which are now available for further consultation. Luis Fonseca Mika Prunnila Erwin Peiner |
