Combining optical metrology with mechanical analysis

Victor Genberg

doi:10.1117/12.2284027

19 May 2003 Combining optical metrology with mechanical analysis

Victor Genberg

Proceedings Volume 10314, Optifab 2003: Technical Digest; 1031412 (2003) https://doi.org/10.1117/12.2284027
Event: OptiFab 2003, 2003, Rochester, NY, United States

Abstract

Mechanical analysis can be useful in support of optical tests. Comparison of test and analysis improves the understanding and confidence in both. Tools are available to convert finite element (FE) results into a format compatible with interferogram test arrays for easy correlation.

Citation Download Citation

Victor Genberg "Combining optical metrology with mechanical analysis", Proc. SPIE 10314, Optifab 2003: Technical Digest, 1031412 (19 May 2003); https://doi.org/10.1117/12.2284027

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available