Design And Construction Of A Phase-Locked Interference Microscope

Glen W. Johnson; Duncan T. Moore

doi:10.1117/12.955415

26 August 1977 Design And Construction Of A Phase-Locked Interference Microscope

Glen W. Johnson, Duncan T. Moore

Proceedings Volume 0104, Multidisciplinary Microscopy; (1977) https://doi.org/10.1117/12.955415
Event: 1977 SPIE/SPSE Technical Symposium East, 1977, Reston, United States

Abstract

An A.C. interference microscope based on a technique called phase-locked interferometry has been constructed. The instrument is capable of detecting phase differences approaching X/100. It may be used for measuring surface features (roughness, curvature) or transparent phase objects such as gradient index materials, microballoons and biological samples.

Citation Download Citation

Glen W. Johnson and Duncan T. Moore "Design And Construction Of A Phase-Locked Interference Microscope", Proc. SPIE 0104, Multidisciplinary Microscopy, (26 August 1977); https://doi.org/10.1117/12.955415

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