An efficient way to fabricate micro transmission grating inside quartz and PDMS material by femtosecond laser micromachining

Sanyogita; Amar Ghar; U. Das; P. K. Panigrahi

doi:10.1117/12.2280219

16 October 2017 An efficient way to fabricate micro transmission grating inside quartz and PDMS material by femtosecond laser micromachining

Sanyogita, Amar Ghar, U. Das, P. K. Panigrahi

Author Affiliations +

Proceedings Volume 10448, Optifab 2017; 104482N (2017) https://doi.org/10.1117/12.2280219
Event: SPIE Optifab, 2017, Rochester, New York, United States

Abstract

We report fabrication of optical volume grating inside the quartz glass and PDMS sample using femtosecond laser based micromachining system with 10μm grating period and areaof 2mm x 6mm x 2mm thickness. The wavelength of femtosecond (fs) laser system is 775nm, repetition rate and pulse width of the system is 1 KHz and 100 fs respectively. Both embedded micro gratings are successfully demonstrated under same fabrication parameters. The comparison of diffraction efficiency and angle of diffraction up to the third order of diffraction for grating inside the quartz glass and PDMS has been examined at 632.8 nm, 532 nm and 447 nm respectively. The change in R.I of laser modified region was obtained ~10^-3.

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Sanyogita, Amar Ghar, U. Das, and P. K. Panigrahi "An efficient way to fabricate micro transmission grating inside quartz and PDMS material by femtosecond laser micromachining", Proc. SPIE 10448, Optifab 2017, 104482N (16 October 2017); https://doi.org/10.1117/12.2280219

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