Monitoring of laser material processing using machine integrated low-coherence interferometry

Rouwen Kunze; Niels König; Robert Schmitt

doi:10.1117/12.2270896

13 June 2017 Monitoring of laser material processing using machine integrated low-coherence interferometry

Rouwen Kunze, Niels König, Robert Schmitt

Proceedings Volume 10449, Fifth International Conference on Optical and Photonics Engineering; 104492U (2017) https://doi.org/10.1117/12.2270896
Event: Fifth International Conference on Optical and Photonics Engineering, 2017, Singapore, Singapore

Abstract

Laser material processing has become an indispensable tool in modern production. With the availability of high power pico- and femtosecond laser sources, laser material processing is advancing into applications, which demand for highest accuracies such as laser micro milling or laser drilling. In order to enable narrow tolerance windows, a closedloop monitoring of the geometrical properties of the processed work piece is essential for achieving a robust manufacturing process. Low coherence interferometry (LCI) is a high-precision measuring principle well-known from surface metrology. In recent years, we demonstrated successful integrations of LCI into several different laser material processing methods. Within this paper, we give an overview about the different machine integration strategies, that always aim at a complete and ideally telecentric integration of the measurement device into the existing beam path of the processing laser. Thus, highly accurate depth measurements within machine coordinates and a subsequent process control and quality assurance are possible. First products using this principle have already found its way to the market, which underlines the potential of this technology for the monitoring of laser material processing.

Citation Download Citation

Rouwen Kunze, Niels König, and Robert Schmitt "Monitoring of laser material processing using machine integrated low-coherence interferometry", Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 104492U (13 June 2017); https://doi.org/10.1117/12.2270896

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available