Stress metrology for flat-panel displays G6 and bigger

Wojtek J. Walecki

doi:10.1117/12.2286781

19 February 2018 Stress metrology for flat-panel displays G6 and bigger

Wojtek J. Walecki

Proceedings Volume 10556, Advances in Display Technologies VIII; 105560E (2018) https://doi.org/10.1117/12.2286781
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

We the tool for measurement of the stress in Generation 6 Flat Panel Displays (G6 FPD) and larger by observing the distortion of image of the light emitting device pattern reflected in the substrate. The observed topography is used to calculate stress in film. The metrology does not involve any moving parts. Tool has repeatability and accuracy of the order of 5 MPa for the glass and film thickness of 0.7 mm, and 5 μm respectively. The measurement time is smaller than 100 s. Tool does is fully compatible with standard robot based glass handling technology.

Citation Download Citation

Wojtek J. Walecki "Stress metrology for flat-panel displays G6 and bigger", Proc. SPIE 10556, Advances in Display Technologies VIII, 105560E (19 February 2018); https://doi.org/10.1117/12.2286781

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