Synthesis of metal nanoparticle and patterning in polymeric films induced by electron beam

Hiroki Yamamoto; Takahiro Kozawa; Seiichi Tagawa; Jean-Louis Marignier; Mehran Mostafavi; Jacqueline Belloni

doi:10.1117/12.2297331

13 March 2018 Synthesis of metal nanoparticle and patterning in polymeric films induced by electron beam

Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, Jean-Louis Marignier, Mehran Mostafavi, Jacqueline Belloni

Proceedings Volume 10586, Advances in Patterning Materials and Processes XXXV; 105861G (2018) https://doi.org/10.1117/12.2297331
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

Using an electron beam, thin polymeric films loaded with metal nanoparticles of silver were prepared by a one-step irradiation-induced reduction of the metal ions embedded in the polymer. The metal nanoparticles were observed by either optical absorption or microscopy. The mechanism of the reduction of metal ions and of the polymer crosslinking were deduced from the average absorbance measurements. In view of realizing specific patterns of high resolution using the electron beam, electron beam produces 200 nm wide lines that can be separated by unexposed spaces of adjustable width, where precursors were dissolved. The resolution of the electron beam has been exploited to demonstrate the achievement of nanopatterning on polymer films using a direct-writing process. This method supplies interesting applications such as masks, replicas, or imprint molds of improved density and contrast.

Citation Download Citation

Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, Jean-Louis Marignier, Mehran Mostafavi, and Jacqueline Belloni "Synthesis of metal nanoparticle and patterning in polymeric films induced by electron beam", Proc. SPIE 10586, Advances in Patterning Materials and Processes XXXV, 105861G (13 March 2018); https://doi.org/10.1117/12.2297331

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