Parylene-C diaphragm-based fiber-optic Fabry-Perot acoustic sensor for trace gas detection

Z. Gong; X. Zhou; K. Chen; X. Zhou; Q. Yu

doi:10.1117/12.2286076

10 January 2018 Parylene-C diaphragm-based fiber-optic Fabry-Perot acoustic sensor for trace gas detection

Z. Gong, X. Zhou, K. Chen, X. Zhou, Q. Yu

Proceedings Volume 10618, 2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications; 106180O (2018) https://doi.org/10.1117/12.2286076
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China

Abstract

We demonstrate a high-sensitivity fiber-optic Fabry-Perot acoustic sensor based on a thin Parylene-C diaphragm. The vacuum thermal evaporation deposition method is used to fabricate the Parylene-C nanofilm, which possesses strong adhesion and good compactness. Based on these characteristics, the Parylene-C diaphragm is fabricated with 9 mm in diameter and 500 nm in thickness. The noise limited equivalent acoustic signal level is 33.5 μPa/Hz^1/2 at the frequency of 30 Hz. The pressure sensitivities of the acoustic sensor are more than 1000 mV/Pa at the frequency from 10 Hz to 30 Hz. The fundamental resonance frequency of the Parylene-C diaphragm is about 13 Hz. The acoustic sensor is applied in a multiple trace gas detection system based on photoacoustic spectroscopy. The detection limits of acetylene (C₂H₂), carbon monoxide (CO) and carbon dioxide (CO₂) are achieved to be 0.25, 0.32 and 1.1 parts-per-million, respectively.

Citation Download Citation

Z. Gong, X. Zhou, K. Chen, X. Zhou, and Q. Yu "Parylene-C diaphragm-based fiber-optic Fabry-Perot acoustic sensor for trace gas detection", Proc. SPIE 10618, 2017 International Conference on Optical Instruments and Technology: Advanced Optical Sensors and Applications, 106180O (10 January 2018); https://doi.org/10.1117/12.2286076

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