Recent Developments In Large Area Scientific CCD Image Sensors

James Janesick; Tom Elliott; Richard Bredthauer; John Cover; Russell Schaefer; Richard Varian

doi:10.1117/12.952513

23 May 1989 Recent Developments In Large Area Scientific CCD Image Sensors

James Janesick, Tom Elliott, Richard Bredthauer, John Cover, Russell Schaefer, Richard Varian

Proceedings Volume 1071, Optical Sensors and Electronic Photography; (1989) https://doi.org/10.1117/12.952513
Event: OE/LASE '89, 1989, Los Angeles, CA, United States

Abstract

The design and performance of a 1024x1024 pixel charge-coupled device (CCD) imager are described. This device is fabricated utilizing a 3-phase, three-level polysilicon gate process. The chip is thinned and is employed in the back-illumination mode. Detailed measurements including imagery, read noise, full well capacity, charge transfer efficiency, linearity, dark current, spectral response, residual image, and charge collection efficiency are reported.

Citation Download Citation

James Janesick, Tom Elliott, Richard Bredthauer, John Cover, Russell Schaefer, and Richard Varian "Recent Developments In Large Area Scientific CCD Image Sensors", Proc. SPIE 1071, Optical Sensors and Electronic Photography, (23 May 1989); https://doi.org/10.1117/12.952513

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