Research on precision grinding technology of large scale and ultra thin optics

Lian Zhou; Qiancai Wei; Jie Li; Xianhua Chen; Qinghua Zhang

doi:10.1117/12.2317469

5 March 2018 Research on precision grinding technology of large scale and ultra thin optics

Lian Zhou, Qiancai Wei, Jie Li, Xianhua Chen, Qinghua Zhang

Proceedings Volume 10710, Young Scientists Forum 2017; 107102Y (2018) https://doi.org/10.1117/12.2317469
Event: Young Scientists Forum 2017, 2017, Shanghai, China

Abstract

The flatness and parallelism error of large scale and ultra thin optics have an important influence on the subsequent polishing efficiency and accuracy. In order to realize the high precision grinding of those ductile elements, the low deformation vacuum chuck was designed first, which was used for clamping the optics with high supporting rigidity in the full aperture. Then the optics was planar grinded under vacuum adsorption. After machining, the vacuum system was turned off. The form error of optics was on-machine measured using displacement sensor after elastic restitution. The flatness would be convergenced with high accuracy by compensation machining, whose trajectories were integrated with the measurement result. For purpose of getting high parallelism, the optics was turned over and compensation grinded using the form error of vacuum chuck. Finally, the grinding experiment of large scale and ultra thin fused silica optics with aperture of 430mm×430mm×10mm was performed. The best P-V flatness of optics was below 3 μm, and parallelism was below 3 ″. This machining technique has applied in batch grinding of large scale and ultra thin optics.

Citation Download Citation

Lian Zhou, Qiancai Wei, Jie Li, Xianhua Chen, and Qinghua Zhang "Research on precision grinding technology of large scale and ultra thin optics", Proc. SPIE 10710, Young Scientists Forum 2017, 107102Y (5 March 2018); https://doi.org/10.1117/12.2317469

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