Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry

Kewei E.; Dahai Li; Jianke Zhao; Xun Xue; Jing Li; Kun Li; Shangkuo Liu; Zhengfeng Wang; Yan Zhou

doi:10.1117/12.2504666

31 August 2018 Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry

Kewei E., Dahai Li, Jianke Zhao, Xun Xue, Jing Li, Kun Li, Shangkuo Liu, Zhengfeng Wang, Yan Zhou

Author Affiliations +

Proceedings Volume 10835, Global Intelligence Industry Conference (GIIC 2018); 108350H (2018) https://doi.org/10.1117/12.2504666
Event: Global Intelligent Industry Conference 2018, 2018, Beijing, China

Abstract

Absolute measurement with Phase Measuring Deflectometry (PMD) is gaining importance in industry, but the accuracy of deflectometry metrology is strongly influenced by the level of calibration. In order to improve the accuracy of the PMD to a level where it competes with interferometry, a reference calibration process is commonly carried out to carefully calibrate the systematic errors. The systematic errors obtained by measuring a high quality reference surface can be subtracted from the measurement of a test surface to get its actual surface, however, it could introduce the surface error of reference into the measurement. To alleviate this problem, this paper introduces a technique named “rotational shear phase measuring deflectometry”, this technique have the ability of removing the rotationally asymmetric systematic errors from the test surface without using a reference surface. The validity of this technique has been demonstrated by simulation and our experimental results.

Citation Download Citation

Kewei E., Dahai Li, Jianke Zhao, Xun Xue, Jing Li, Kun Li, Shangkuo Liu, Zhengfeng Wang, and Yan Zhou "Rotationally asymmetric figure measurement of optical flat using rotational shear phase measuring deflectometry", Proc. SPIE 10835, Global Intelligence Industry Conference (GIIC 2018), 108350H (31 August 2018); https://doi.org/10.1117/12.2504666

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KEYWORDS

Wavefronts

Calibration

Zernike polynomials

Deflectometry

Cameras

Optical testing

LCDs

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