Presentation + Paper
4 March 2019 Suspended low-loss germanium waveguides for the longwave-infrared
A. Osman, M. Nedeljkovic, J. Soler Penades, Y. Wu, Z. Qu, A. Z. Khokhar, G. Z. Mashanovich
Author Affiliations +
Proceedings Volume 10923, Silicon Photonics XIV; 1092308 (2019) https://doi.org/10.1117/12.2506553
Event: SPIE OPTO, 2019, San Francisco, California, United States
Abstract
Germanium has become a material of high interest for mid-infrared (MIR) integrated photonics due to its complementary metal-oxide-semiconductor (CMOS) compatibility and its wide transparency window covering the 2-15 μm spectral region exceeding the 4 μm and 8 μm limit of the Silicon-on-Insulator (SOI) platform and Si material respectively. Here, we present suspended germanium waveguides operating at wavelengths of 3.8 μm and 7.67 μm with propagation losses of 2.9 ± 0.2 dB/cm and 2.6 ± 0.3 dB/cm respectively.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Osman, M. Nedeljkovic, J. Soler Penades, Y. Wu, Z. Qu, A. Z. Khokhar, and G. Z. Mashanovich "Suspended low-loss germanium waveguides for the longwave-infrared", Proc. SPIE 10923, Silicon Photonics XIV, 1092308 (4 March 2019); https://doi.org/10.1117/12.2506553
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KEYWORDS
Waveguides

Germanium

Silicon

Wave propagation

Etching

Absorption

Cladding

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