Paper
7 March 2019 Analysis of contacting characteristics on aerostatic bearing stylus displacement sensor
Author Affiliations +
Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 110531F (2019) https://doi.org/10.1117/12.2511216
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China
Abstract
In this paper, the dynamic and static contact characteristics of the aerostatic bearing stylus displacement sensor are analyzed, including static contact damage and dynamic response. The dynamic response at frequency and different speeds is studied and obtained the relationship between the measured force and frequency and velocity. The stylus does not contact well from the surface when the measuring force is less than 0. In this case, the traceability of the tip can be analyzed based on the characteristics of the amplitude. Finally, the experimental verification of the relevant theory is obtained by measuring the aluminum turning sample at different speeds.
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Wu Hao, Suping Chang, Jianfei Zhou, Chunbing Hu, and Zhongyu Zhang "Analysis of contacting characteristics on aerostatic bearing stylus displacement sensor", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110531F (7 March 2019); https://doi.org/10.1117/12.2511216
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KEYWORDS
Sensors

Aluminum

Control systems

Lithium

Mechanical engineering

Velocity measurements

Electromagnetism

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