Design and simulation of a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism

Chengliang Pan; Ting Zhang; Tianliang Dai; Liling Han; Haojie Xia; Liandong Yu

doi:10.1117/12.2512795

7 March 2019 Design and simulation of a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism

Chengliang Pan, Ting Zhang, Tianliang Dai, Liling Han, Haojie Xia, Liandong Yu

Author Affiliations +

Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 110534B (2019) https://doi.org/10.1117/12.2512795
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

With rapid developments of micro/nano science and technology, precision platforms are widely required in the research and industry fields. This paper presents a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism. With symmetrical flexible structure and specific piezoelectric driving manner, effective and decoupled actuation of the stator is achieved. FEA simulations are conducted to investigate the characteristics of the stator. With established dynamic model of the platform, motion responses of stator and slider in the two directions are simulated and analyzed. With simultaneous actuation of the 2-DOF motions, a motion interaction phenomenon is raised and discussed.

Citation Download Citation

Chengliang Pan, Ting Zhang, Tianliang Dai, Liling Han, Haojie Xia, and Liandong Yu "Design and simulation of a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110534B (7 March 2019); https://doi.org/10.1117/12.2512795

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