Investigation of non-uniformity of classically polished fused silica surfaces via laser-induced breakdown spectroscopy (Conference Presentation)

Christoph Gerhard

doi:10.1117/12.2537878

16 August 2019 Investigation of non-uniformity of classically polished fused silica surfaces via laser-induced breakdown spectroscopy (Conference Presentation)

Christoph Gerhard

Author Affiliations +

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 110561J (2019) https://doi.org/10.1117/12.2537878
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

This Conference Presentation, "Investigation of non-uniformity of classically polished fused silica surfaces via laser-induced breakdown spectroscopy," was recorded at SPIE Optical Metrology 2019 held in Munich, Germany.

Conference Presentation

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Christoph Gerhard "Investigation of non-uniformity of classically polished fused silica surfaces via laser-induced breakdown spectroscopy (Conference Presentation)", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110561J (16 August 2019); https://doi.org/10.1117/12.2537878

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