F-P interference optical fiber pressure temperature composite sensor based on sapphire MEMS chip

Ya-lin Wu; Zhi-qiang Shao; Wei Wang; Yong-hai Cao; Tong Zhang; Jia-yu Bi

doi:10.1117/12.2524596

10 May 2019 F-P interference optical fiber pressure temperature composite sensor based on sapphire MEMS chip

Ya-lin Wu, Zhi-qiang Shao, Wei Wang, Yong-hai Cao, Tong Zhang, Jia-yu Bi

Proceedings Volume 11068, Second Symposium on Novel Technology of X-Ray Imaging; 110681Q (2019) https://doi.org/10.1117/12.2524596
Event: Second Symposium on Novel Technology of X-Ray Imaging, 2018, Hefei, China

Abstract

A Fabry-Pérot (F-P) interference optical fiber pressure temperature composite sensor based on all sapphire substrate is researched and fabricated for high temperature applications. Micro-electro-mechanical systems (MEMS) technology and atomic direct bonding technology are used to fabricate F-P pressure temperature composite sensing cavity and then packaged to form core components of the sensing probe. The high-temperature fiber is used as transmission medium of optical signal. Length of pressure sensing cavity is 104.5μm, length of temperature sensing cavity is 434μm. Sensing characteristics test on chip is carried out, and pressurization tests on sensor from room temperature to 400℃ are performed. The experimental results show that pressure chip of 5MPa can distinguish pressure of 0.17kPa, the relative resolution can reach 33ppm, and temperature cavity length fluctuate ±0.1nm within 678s, which is equal to 0.05℃ temperature error. Performance index of sensor in temperature range of the whole is good. This research provides strong support for extrinsic optical fiber sensor based on sapphire composite F-P cavity using for precise and stable pressure and temperature measurement in high temperature environment.

Citation Download Citation

Ya-lin Wu, Zhi-qiang Shao, Wei Wang, Yong-hai Cao, Tong Zhang, and Jia-yu Bi "F-P interference optical fiber pressure temperature composite sensor based on sapphire MEMS chip", Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 110681Q (10 May 2019); https://doi.org/10.1117/12.2524596

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KEYWORDS

Sensors

Sapphire

Composites

Temperature metrology

Fiber optics sensors

Microelectromechanical systems

Optical fibers

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