Research on magnetorheological finishing of aspheric optics for single-crystal silicon

Yunfei Zhang; Fengzhou Fang; Wei Fan; Wen Huang; Chao Wang; Shasha Ma; Jianhong He

doi:10.1117/12.2525161

10 May 2019 Research on magnetorheological finishing of aspheric optics for single-crystal silicon

Yunfei Zhang, Fengzhou Fang, Wei Fan, Wen Huang, Chao Wang, Shasha Ma, Jianhong He

Proceedings Volume 11068, Second Symposium on Novel Technology of X-Ray Imaging; 110682R (2019) https://doi.org/10.1117/12.2525161
Event: Second Symposium on Novel Technology of X-Ray Imaging, 2018, Hefei, China

Abstract

Single-crystal silicon is a typical infrared optical material, commonly machined by single-point diamond turning (SPDT) with micro-level figure accuracy and nano-level roughness. However, the tool marks, surface damage and middle-frequency error left by the diamond turning process may greatly affect the imaging quality. Magnetorheological finishing (MRF) is a deterministic, sub-aperture polishing technology that is very helpful in improving both surface nano-roughness and surface figure and can be used to polish silicon materials. Although the feasibility of MRF for single-crystal silicon has been proved, there are still some problems such as low material removal rate and uncontrollable surface integrity. In this study, the MRF mechanism for single-crystal silicon was explored, and the preparation method of MR fluid was optimised. An experiment was performed to machine a large-aperture single-crystal silicon aspheric surface on an MRF machine developed by China Academy of Engineering Physics. After polishing for several times, the figure accuracy PV improved from 5.9 μm to 0.56 μm, and roughness Rq reduced to 1.2 nm, verifying the excellent performance of MRF in infrared material processing.

Citation Download Citation

Yunfei Zhang, Fengzhou Fang, Wei Fan, Wen Huang, Chao Wang, Shasha Ma, and Jianhong He "Research on magnetorheological finishing of aspheric optics for single-crystal silicon", Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 110682R (10 May 2019); https://doi.org/10.1117/12.2525161

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