DNA-based nanofabrication for low-cost, high-resolution patterning

Liwei Hui; Haitao Liu

doi:10.1117/12.2532934

7 October 2019 DNA-based nanofabrication for low-cost, high-resolution patterning

Liwei Hui, Haitao Liu

Proceedings Volume 11168, Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence II; 1116805 (2019) https://doi.org/10.1117/12.2532934
Event: SPIE Security + Defence, 2019, Strasbourg, France

Abstract

This paper summarizes our work on DNA-based nanofabrication. In the past decade, our group has developed several strategies to employ unmodified DNA nanostructures as templates for high-resolution patterning. We showed that DNA nanostructures can locally modulate vapor phase etching and deposition reactions. As a result, both negative-tone and positive-tone pattern transfers were achieved within one reaction system by adjusting reaction conditions. We also showed that DNA nanostructures can be directly imprinted onto a variety of substrates, including soft polymers and selfassembled monolayer molecules. In these cases, various surface patterns were obtained with the size ranging from micrometer to sub-10 nm. These DNA-patterned substrates have interesting interfacial properties, such as site-specific reactivity and antifouling. Overall, our work highlighted the potentials of DNA-based nanofabrication for high-resolution patterning in electronic and surface engineering applications.

Citation Download Citation

Liwei Hui and Haitao Liu "DNA-based nanofabrication for low-cost, high-resolution patterning", Proc. SPIE 11168, Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence II, 1116805 (7 October 2019); https://doi.org/10.1117/12.2532934

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available