Femtosecond laser micromachining of Fabry-Pérot interferometers in fused silica for refractive index sensing

João M. Maia; Vítor A. Amorim; Duarte Viveiros; P. V. S. Marques

doi:10.1117/12.2527302

3 October 2019 Femtosecond laser micromachining of Fabry-Pérot interferometers in fused silica for refractive index sensing

João M. Maia, Vítor A. Amorim, Duarte Viveiros, P. V. S. Marques

Author Affiliations +

Proceedings Volume 11207, Fourth International Conference on Applications of Optics and Photonics; 1120712 (2019) https://doi.org/10.1117/12.2527302
Event: IV International Conference on Applications of Optics and Photonics (AOP 2019), 2019, Lisbon, Portugal

Abstract

A Fabry-Pérot interferometer was fabricated inside a fused silica substrate through femtosecond laser micromachining. The influence of the waveguide’s writing parameters on the measured signal’s quality was studied for an interferometer with a 27-μm wide cavity. Optimal signal-to-noise ratio and fringe visibility were obtained for waveguides written at 75 nJ and 50 μm/s. The same device was characterized with different refractive index liquids, and a maximum sensitivity of 1181.4±23.6 nm/RIU was obtained in the index range of 1.2962 to 1.3828 (at 1550 nm) for the spectral order 𝑚 = 46.

Citation Download Citation

João M. Maia, Vítor A. Amorim, Duarte Viveiros, and P. V. S. Marques "Femtosecond laser micromachining of Fabry-Pérot interferometers in fused silica for refractive index sensing", Proc. SPIE 11207, Fourth International Conference on Applications of Optics and Photonics, 1120712 (3 October 2019); https://doi.org/10.1117/12.2527302

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