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9 March 2020 Super-resolution reflection-mode holographic microscope for 3d imaging of semiconductor devices without optical lens (Conference Presentation)
Jaehyeon Son, Seung Beom Park, Kyungwon Yun, Taewan Kim, Jaehwang Jung, Myungjun Lee
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Proceedings Volume 11245, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXVII; 1124506 (2020) https://doi.org/10.1117/12.2551036
Event: SPIE BiOS, 2020, San Francisco, California, United States
Abstract
We demonstrate a high resolution lens-free holographic microscopy in reflection geometry based on a pixel super resolution (SR) method. The lens-free microscopy uses a novel Michelson geometry suitable to image reflective samples with the large field of view, while the Fourier domain SR technique is applied to obtain the high resolution hologram, achieving the sub-pixel resolution of 1.2 μm in the USAF reflection target by utilizing the randomly shifted low resolution images. The proposed compact microscopy technique enables to provide high resolution amplitude and phase imaging, those are suitable for biology and semiconductor imaging applications.
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Jaehyeon Son, Seung Beom Park, Kyungwon Yun, Taewan Kim, Jaehwang Jung, and Myungjun Lee "Super-resolution reflection-mode holographic microscope for 3d imaging of semiconductor devices without optical lens (Conference Presentation)", Proc. SPIE 11245, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXVII, 1124506 (9 March 2020); https://doi.org/10.1117/12.2551036
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KEYWORDS
Holography
Microscopy
Image resolution
Super resolution
Microscopes
Semiconductors
Imaging devices
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