Development of a complex laser processing system for cutting and drilling

Hyeongchan Park; Kwanghyun Ryu; Seokkyun Lim; Sunwoo Lee

doi:10.1117/12.2550759

2 March 2020 Development of a complex laser processing system for cutting and drilling

Hyeongchan Park, Kwanghyun Ryu, Seokkyun Lim, Sunwoo Lee

Proceedings Volume 11268, Laser-based Micro- and Nanoprocessing XIV; 1126828 (2020) https://doi.org/10.1117/12.2550759
Event: SPIE LASE, 2020, San Francisco, California, United States

Abstract

Laser processing in the market is required with high precision and fast speed in large area without stop. In order to do this technology, it is essential to synchronize scanner and stage and it is able to process large area exceeding optical field size by scan lens. Additionally, this processing is very important to stabilize and optimize optical system such as laser optic and vision for high precision and fast speed. So, we developed a complex laser processing system for cutting and drilling etc, and then we tested various laser applications using the developed complex laser processing system. So in this paper, the various functions and performance of the developed complex laser processing system are described, and the laser application results will be introduced.

Citation Download Citation

Hyeongchan Park, Kwanghyun Ryu, Seokkyun Lim, and Sunwoo Lee "Development of a complex laser processing system for cutting and drilling", Proc. SPIE 11268, Laser-based Micro- and Nanoprocessing XIV, 1126828 (2 March 2020); https://doi.org/10.1117/12.2550759

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