Fabrication of plasmonic slot waveguides in single-crystalline gold films and freestanding photonic metasurfaces by focused ion beam milling (Conference Presentation)

Stefan Linden

doi:10.1117/12.2550461

10 March 2020 Fabrication of plasmonic slot waveguides in single-crystalline gold films and freestanding photonic metasurfaces by focused ion beam milling (Conference Presentation)

Stefan Linden

Author Affiliations +

Proceedings Volume 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII; 1129207 (2020) https://doi.org/10.1117/12.2550461
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

We report on the fabrication and near field characterization of plasmonic slot waveguides in single- and poly crystalline gold films operating at telecommunication wavelengths. Moreover, we present freestanding photonic metasurfaces with a total thickness of only 40 nm prepared by focused ion beam milling of nanovoids in a carbon film followed by thermal evaporation of gold and plasma ashing of the carbon film.

Conference Presentation

Citation Download Citation

Stefan Linden "Fabrication of plasmonic slot waveguides in single-crystalline gold films and freestanding photonic metasurfaces by focused ion beam milling (Conference Presentation)", Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 1129207 (10 March 2020); https://doi.org/10.1117/12.2550461

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