An experimental evaluation method for the performance of multiple probes on coordinate measuring system

Sen Zhou; Jian Xu; Tao Lei; Yan Yu; Yingqian Ni

doi:10.1117/12.2542069

18 December 2019 An experimental evaluation method for the performance of multiple probes on coordinate measuring system

Sen Zhou, Jian Xu, Tao Lei, Yan Yu, Yingqian Ni

Author Affiliations +

Proceedings Volume 11338, AOPC 2019: Optical Sensing and Imaging Technology; 113380P (2019) https://doi.org/10.1117/12.2542069
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China

Abstract

This study proposes an experimental method for the performance evaluation of a commercial combined probing system equipped with a contacting probe, an imaging probe, and a line laser scanner developed by our cooperation. According to its application purpose, this method first obtains the circular characteristics of our novel designed 3D artefact composed of 2D rings, cone and cylinders. It is suitable to measure the touch probe, imaging probe as well as optical sensor. Next, detailed measuring procedures were defined for this artifact, in order to achieve comparable results and make the measurements feasible for the different sensors involved. A series of representative experiments were carried out on a commercial combined probing system produced by our partner. The experimental results show that multiple probing system form error and location error were less than 4.0μm, and multiple probing system size error was less than 2.0μm in three different registration positions. System combination errors were less than its maximum permissible errors (MPEs). On the other hand, its root mean errors (RMSE) were less than 0.5μm. Therefore, we can conclude that the designed artifact is suitable to be used to assess the performance of CMMs with multiple probing systems. These conclusions are helpful for further use of this combined probing system and can be utilized to optimize those combined parameters further.

Citation Download Citation

Sen Zhou, Jian Xu, Tao Lei, Yan Yu, and Yingqian Ni "An experimental evaluation method for the performance of multiple probes on coordinate measuring system", Proc. SPIE 11338, AOPC 2019: Optical Sensing and Imaging Technology, 113380P (18 December 2019); https://doi.org/10.1117/12.2542069

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KEYWORDS

Sensors

Standards development

Calibration

Laser scanners

3D metrology

Imaging systems

Inspection

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