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18 December 2019 Probe radius compensation based on aspherical surface reconstruction in CMM profile measurement
Ang Li, Yonggang Wang, Jiyou Zhang
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Proceedings Volume 11341, AOPC 2019: Space Optics, Telescopes, and Instrumentation; 1134105 (2019) https://doi.org/10.1117/12.2539107
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China
Abstract
Surface measurement by CMM is the main method in the process of large-aperture high order aspheric mirrors fabrication. Because of the existence of probe-radius error in measurement data, the achieved surface residual cannot be directly used in mirror fabrication. So the Probe-Radius Compensation Based on Aspherical Surface Reconstruction is proposed. The algorithm comes up with a high precision surface fitting model, which introduces coordinate system space deviation parameters and use this model to calculate compensation vectors to correct the probe-radius error. The experiment shows that there is only a deviation of 4nm between the corrected data and the real data and fully meets the needs of optical fabrication.
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Ang Li, Yonggang Wang, and Jiyou Zhang "Probe radius compensation based on aspherical surface reconstruction in CMM profile measurement", Proc. SPIE 11341, AOPC 2019: Space Optics, Telescopes, and Instrumentation, 1134105 (18 December 2019); https://doi.org/10.1117/12.2539107
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KEYWORDS
Mirrors
Data modeling
Aspheric lenses
Reconstruction algorithms
Detection and tracking algorithms
Aspheric optics
Optical fabrication
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