Computer Phase Microscope For Submicron Structure Topology Monitoring

Vladimir P. Tychinsky; Igor N. Masalov; Vladimir L. Pankov; Dmitry V. Ublinsky

doi:10.1117/12.961765

28 September 1989 Computer Phase Microscope For Submicron Structure Topology Monitoring

Vladimir P. Tychinsky, Igor N. Masalov, Vladimir L. Pankov, Dmitry V. Ublinsky

Proceedings Volume 1139, Optical Storage and Scanning Technology; (1989) https://doi.org/10.1117/12.961765
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

The laser interference phase-measuring computer-aided microscope enabling 3-D presentation of surface structure has been developed. Plane and height resolution numbers are 0,1μm and 1 nm. Results using this technics, application area and error sources are discussed.

Citation Download Citation

Vladimir P. Tychinsky, Igor N. Masalov, Vladimir L. Pankov, and Dmitry V. Ublinsky "Computer Phase Microscope For Submicron Structure Topology Monitoring", Proc. SPIE 1139, Optical Storage and Scanning Technology, (28 September 1989); https://doi.org/10.1117/12.961765

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