Partial Least-Squares Calibration Diagnostics Applied To The FT-IR Analysis Of Borophosphosilicate Glass (BPSG) Thin Films

David M. Haaland

doi:10.1117/12.969531

1 December 1989 Partial Least-Squares Calibration Diagnostics Applied To The FT-IR Analysis Of Borophosphosilicate Glass (BPSG) Thin Films*

David M. Haaland

Author Affiliations +

Proceedings Volume 1145, 7th Intl Conf on Fourier Transform Spectroscopy; (1989) https://doi.org/10.1117/12.969531
Event: Seventh International Conference on Fourier and Computerized Infrared Spectroscopy, 1989, Fairfax, VA, United States

Abstract

Full-spectrum multivariate calibration methods are capable of providing a multitude of diagnostic capabilities for evaluating the quality of the calibration, identifying problem calibration samples, and flagging unknown samples whose analysis by these methods might be unreliable. These diagnostics are demonstrated for the analysis of BPSG thin films on silicon using infrared spectroscopy and partial least-squares methods.

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David M. Haaland "Partial Least-Squares Calibration Diagnostics Applied To The FT-IR Analysis Of Borophosphosilicate Glass (BPSG) Thin Films*", Proc. SPIE 1145, 7th Intl Conf on Fourier Transform Spectroscopy, (1 December 1989); https://doi.org/10.1117/12.969531

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