The NPMM-200: large area high resolution for freeform surface measurement

Christian Schober; Christof Pruss; Alois Herkommer; Wolfgang Osten

doi:10.1117/12.2564918

8 July 2020 The NPMM-200: large area high resolution for freeform surface measurement

Christian Schober, Christof Pruss, Alois Herkommer, Wolfgang Osten

Proceedings Volume 11478, Seventh European Seminar on Precision Optics Manufacturing; 1147807 (2020) https://doi.org/10.1117/12.2564918
Event: Seventh European Seminar on Precision Optics Manufacturing, 2020, Teisnach, Germany

Abstract

Nanometer resolution metrology is a significant topic in the development and production of complex shaped high precision optics. The Nanopositioning and Nanomeasuring Machine NPMM-200 at ITO is built for nanometer scale positioning in a large scale measurement volume of 200 mm x 200 mm x 25 mm. The concept of the machine is based on a high precision interferometrically controlled stage in a stable metrological frame made of glass-ceramic. In this frame, different types of sensors can be attached for measurement of surface topographies. In this contribution, we present the use of optical sensors, such as a fixed focus probe, for measuring of high precision aspheric and freeform optics with this new machine.

Citation Download Citation

Christian Schober, Christof Pruss, Alois Herkommer, and Wolfgang Osten "The NPMM-200: large area high resolution for freeform surface measurement", Proc. SPIE 11478, Seventh European Seminar on Precision Optics Manufacturing, 1147807 (8 July 2020); https://doi.org/10.1117/12.2564918

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