Absolute Multilayer Characterization At High Spatial Resolution Via Real-Time Soft X-Ray Imaging

Larry Madison

doi:10.1117/12.962619

27 November 1989 Absolute Multilayer Characterization At High Spatial Resolution Via Real-Time Soft X-Ray Imaging

Larry Madison

Proceedings Volume 1159, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy and Atomic Physics; (1989) https://doi.org/10.1117/12.962619
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

An imaging-based technique has been modeled for its suitability and performance in measuring the spatial distribution of the absolute soft x-ray characterization of flat multilayer mirrors. Such a technique, if implemented experimentally, is anticipated to have substantially higher throughput ( wafers/day ) than is possible from prevailing non-imaging means.

Citation Download Citation

Larry Madison "Absolute Multilayer Characterization At High Spatial Resolution Via Real-Time Soft X-Ray Imaging", Proc. SPIE 1159, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy and Atomic Physics, (27 November 1989); https://doi.org/10.1117/12.962619

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