Analysis of row to row routing in double height standard-cells

M. M. Berkens; S. J. Klaver

doi:10.1117/12.2587213

22 February 2021 Analysis of row to row routing in double height standard-cells

M. M. Berkens, S. J. Klaver

Proceedings Volume 11614, Design-Process-Technology Co-optimization XV; 1161410 (2021) https://doi.org/10.1117/12.2587213
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

For advanced technology nodes the design of Standard Cell Libraries is becoming increasingly challenging. This is because with shrinking cell heightsthe available routing resources in the cells are becoming a major lim iting f actor, along with the rising complexity of design rules and technology options. The challenge of designing goodcells holds for both production libraries, where many cells need to be created, as well as for DTCO experiments, where many variations of a smaller library needto be made. Both types of libraries require highly optimized cells, either to have high quality design, or to have accurate PPA assessment during DTCO. Additionally, DTCO no longer meets the needs of today’s technological cha llenges and needs to be extended from Materials to Systems. At Applied Materials we include automatedStandard Cell Librarygeneration into ourMSCO^TM (Materials to Systems Co -Optimization^TM) f low. To demonstrate the power of automated Standard Cell Library generation, this paperfocuses on four experiments to a ssess the impact of advancedprocess and design rules and the choice of standard cell architectures;in particular double height cells. The experiments include different technology and architectural choices,such asthe number of tracks, poly silicon and diffusion for routing in between the rows in the cells. The results are compared in terms of theirmanufacturability and size. Ongoing work includes performance and power analysis on representative designs.

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M. M. Berkens and S. J. Klaver "Analysis of row to row routing in double height standard-cells", Proc. SPIE 11614, Design-Process-Technology Co-optimization XV, 1161410 (22 February 2021); https://doi.org/10.1117/12.2587213

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KEYWORDS

Standards development

Complex systems

Materials processing

Diffusion

Logic

Silicon

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