Paper
20 December 1989 Surface Profile Measurements Of Curved Parts
T. C. Bristow, G. Wagner, J. R. Bietry, R. A. Auriemma
Author Affiliations +
Abstract
This paper describes the implementation of an automatic focus control system (Autofocus) to an optical non-contact surface profiling instrument. Such a focus control system extends the operation of the surface profiler to measurements of both roughness and figure that would otherwise be limited by the optical systems depth of focus. Measurement results are presented from a variety of curved samples.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. C. Bristow, G. Wagner, J. R. Bietry, and R. A. Auriemma "Surface Profile Measurements Of Curved Parts", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962816
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CITATIONS
Cited by 1 scholarly publication.
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KEYWORDS
Objectives

Surface finishing

Microscopes

Collimation

Control systems

Beam splitters

Sensors

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