CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 11676 > Article
Presentation
8 March 2021 Utilization of femtosecond lasers for high efficiency and high reliability glass chip fabrication
Jiyeon Choi
Author Affiliations +
Proceedings Volume 11676, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXI; 116760U (2021) https://doi.org/10.1117/12.2585065
Event: SPIE LASE, 2021, Online Only
Abstract
In this talk, we will demonstrate a couple of examples on microfluidic glass chip and implantable device exploiting femtosecond laser-based fabrication. Firstly, an implantable blood pressure sensor packaged by direct laser welding is demonstrated. The sealing quality of the implantable sensors using direct laser welding is compared with the other sensor produced by conventional fabrication method. Secondly, we proposed a novel glass microfluidic chip including a passive micromixer with an impeller which is fabricated in a fused silica. The mixing efficiency up to 99% and the maximum throughput of 30 mL/min was measured.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Jiyeon Choi "Utilization of femtosecond lasers for high efficiency and high reliability glass chip fabrication", Proc. SPIE 11676, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXI, 116760U (8 March 2021); https://doi.org/10.1117/12.2585065
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Glasses
Microfluidics
Femtosecond phenomena
Laser welding
Reliability
Etching
Sensors
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top