Presentation + Paper
5 March 2021 Temperature dependency of responsivity and dark current of nearly ideal black silicon photodiodes
Juha Heinonen, Antti Haarahiltunen, Michael Serue, Daria Kriukova, Ville Vähänissi, Toni P. Pasanen, Hele Savin, Mikko A. Juntunen
Author Affiliations +
Abstract
A high-quality photodiode has high signal-to-noise ratio (SNR), which is ultimately defined by the responsivity and dark current of the photodiode. Black silicon induced junction photodiodes have been shown to have nearly ideal responsivity across a wide range of wavelengths between 175-1100 nm at room temperature (RT). Here we present their spectral responsivity stability and dark current at different temperatures. Both quantities show temperature dependencies similar to conventional pn-junction photodiodes, proving that black silicon photodiodes maintain their improved SNR also at temperatures other than RT.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juha Heinonen, Antti Haarahiltunen, Michael Serue, Daria Kriukova, Ville Vähänissi, Toni P. Pasanen, Hele Savin, and Mikko A. Juntunen "Temperature dependency of responsivity and dark current of nearly ideal black silicon photodiodes", Proc. SPIE 11682, Optical Components and Materials XVIII, 1168207 (5 March 2021); https://doi.org/10.1117/12.2577128
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KEYWORDS
Photodiodes

Signal to noise ratio

Silicon

Temperature metrology

Internal quantum efficiency

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