Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides

Shaonan Zheng; Hong Cai; Linfang Xu; Nanxi Li; Jinjing Fu; Zhonghua Gu; Yao Zhang; Weiguo Chen; Yuxi Cui; Fuu Ming Kai; Lennon Yao Ting Lee

doi:10.1117/12.2581814

5 March 2021 Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides

Shaonan Zheng, Hong Cai, Linfang Xu, Nanxi Li, Jinjing Fu, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yuxi Cui, Fuu Ming Kai, Lennon Yao Ting Lee

Author Affiliations +

Proceedings Volume 11689, Integrated Optics: Devices, Materials, and Technologies XXV; 116890C (2021) https://doi.org/10.1117/12.2581814
Event: SPIE OPTO, 2021, Online Only

Abstract

Gas sensors have wide applications including industrial process control, environment monitoring, safety control, etc. The distribution of these sensors enables data generation for the emerging trend of big data and internet of things. In this work, chip-based non-dispersive infrared (NDIR) gas sensors are demonstrated. Silicon substrate-integrated hollow waveguide (Si-iHWG), which is formed through silicon wafer etching and bonding, is used as optical channel and gas cell. A high sensitivity of 50 ppm for CO2 sensing is demonstrated. The Si-iHWG chip-based sensor with compactness, low cost, versatility, and robustness provides a promising platform for miniaturized gas sensing in various application scenarios.

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Citation Download Citation

Shaonan Zheng, Hong Cai, Linfang Xu, Nanxi Li, Jinjing Fu, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yuxi Cui, Fuu Ming Kai, and Lennon Yao Ting Lee "Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides", Proc. SPIE 11689, Integrated Optics: Devices, Materials, and Technologies XXV, 116890C (5 March 2021); https://doi.org/10.1117/12.2581814

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