Silicon-Etalon Fiber-Optic Temperature Sensor

Glenn Beheim; Klaus Fritsch; Joseph M. Flatico; Massood Tabib Azar

doi:10.1117/12.963069

13 February 1990 Silicon-Etalon Fiber-Optic Temperature Sensor

Glenn Beheim, Klaus Fritsch, Joseph M. Flatico, Massood Tabib Azar

Proceedings Volume 1169, Fiber Optic and Laser Sensors VII; (1990) https://doi.org/10.1117/12.963069
Event: OE/FIBERS '89, 1989, Boston, United States

Abstract

A temperature sensor is described which consists of a silicon etalon that is sputtered directly onto the end of an optical fiber. A two-layer protective cap structure is used to improve the sensor's long-term stability. The sensor's output is wavelength encoded to provide a high degree of immunity from cable and connector effects. This sensor is extremely compact and potentially inexpensive.

Citation Download Citation

Glenn Beheim, Klaus Fritsch, Joseph M. Flatico, and Massood Tabib Azar "Silicon-Etalon Fiber-Optic Temperature Sensor", Proc. SPIE 1169, Fiber Optic and Laser Sensors VII, (13 February 1990); https://doi.org/10.1117/12.963069

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