Due to their superior electro-optical characteristics, including single-frequency symmetrically circular emission, wavelength tunability, and GHz modulation bandwidth, single-mode VCSELs are well suited for many applications, e.g., spectroscopy, encoders, datacom transceivers, and heat assisted magnetic recording. Conventional small aperture oxide confined single-mode VCSELs show excellent electro-optical performance, but there are also limitations that make them less attractive for some applications: Rather low output power, high series resistance, broad beam divergence, and due to their high current densities in combination with high thermal resistance, significant stress at operating conditions that may harm reliability and cause unwanted parameter drifts over time. Implementing a shallow surface relief into the cap layer of a VCSEL allows to increase the aperture size of a singlemode VCSEL, while staying in the single-mode emission regime. As a result, the series and thermal resistance is significantly decreased, as well as the current density at operating conditions. More narrow beam divergence, better MTTF values, and finally better stability of output characteristics, in particular output power and emission wavelength, is achieved. Such stable emission over time is most beneficial for TDLAS systems, but is also advantageous for other applications.
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