III-V-on-Si/SiN lasers realized using micro-transfer-printing

Jing Zhang; Camiel Op de Beeck; Bahawal Haq; Bart Kuyken; Dries Van Thourhout; Joris Van Campenhout; Guy Lepage; Peter Verheyen; Agnieszka Gocalinska; Stijn Cuyvers; Emanuele Pelucchi; Brian Corbett; Artur Hermans; Antonio Jose Trindade; Chris Bower; Roel Baets; Gunther Roelkens; Geert Morthier

doi:10.1117/12.2577157

5 March 2021 III-V-on-Si/SiN lasers realized using micro-transfer-printing

Jing Zhang, Camiel Op de Beeck, Bahawal Haq, Bart Kuyken, Dries Van Thourhout, Joris Van Campenhout, Guy Lepage, Peter Verheyen, Agnieszka Gocalinska, Stijn Cuyvers, Emanuele Pelucchi, Brian Corbett, Artur Hermans, Antonio Jose Trindade, Chris Bower, Roel Baets, Gunther Roelkens, Geert Morthier

Author Affiliations +

Proceedings Volume 11705, Novel In-Plane Semiconductor Lasers XX; 117050J (2021) https://doi.org/10.1117/12.2577157
Event: SPIE OPTO, 2021, Online Only

Abstract

Micro-transfer-printing (µTP) enables the intimate integration of diverse non-inherent functionalities on a target substrate and hence allows for the realization of complex photonic integrated circuits (PICs) with small footprint. By employing a polydimethylsiloxane (PDMS) elastomeric stamp with an array of posts, a large number of micro-components can be integrated on a target wafer in one transfer printing operation, which leads to substantial cost reduction of the resulting PICs. This paper discusses the use of µTP for the realization of III-V lasers on Si and SiN PICs and summarizes the recent progress that has been made in this field.

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Jing Zhang, Camiel Op de Beeck, Bahawal Haq, Bart Kuyken, Dries Van Thourhout, Joris Van Campenhout, Guy Lepage, Peter Verheyen, Agnieszka Gocalinska, Stijn Cuyvers, Emanuele Pelucchi, Brian Corbett, Artur Hermans, Antonio Jose Trindade, Chris Bower, Roel Baets, Gunther Roelkens, and Geert Morthier "III-V-on-Si/SiN lasers realized using micro-transfer-printing", Proc. SPIE 11705, Novel In-Plane Semiconductor Lasers XX, 117050J (5 March 2021); https://doi.org/10.1117/12.2577157

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