Design and fabrication method of a multi-step diffraction grating

Yuan Yao; Debin Pan; Tingting Dong; Jianbo Wang; Chensheng Wang; Anbing Geng

doi:10.1117/12.2590741

18 March 2021 Design and fabrication method of a multi-step diffraction grating

Yuan Yao, Debin Pan, Tingting Dong, Jianbo Wang, Chensheng Wang, Anbing Geng

Proceedings Volume 11780, Global Intelligent Industry Conference 2020; 117801O (2021) https://doi.org/10.1117/12.2590741
Event: Global Intelligent Industry Conference 2020, 2020, Guangzhou, China

Abstract

Grating interferometers are widely used in many miniaturized sensors requiring displacement measurement, such as microphone and accelerometers, because of its small volume and high measurement accuracy. However, the traditional grating can generate a zeroth-order reflected beam, which results in reduced sensor performance, packaging limitations, and laser instability. In this paper, design and manufacture method of a multi-step phase modulation grating is demonstrated. The application of this multi - step grating interferometer is to modulate the intensity of light of level 0 to level ±1 so as to avoid the return to the laser light so as to improve the system stability. On the other hand, due to the increased testing classes of diffraction efficiency, the SNR of the system is improved.

Citation Download Citation

Yuan Yao, Debin Pan, Tingting Dong, Jianbo Wang, Chensheng Wang, and Anbing Geng "Design and fabrication method of a multi-step diffraction grating", Proc. SPIE 11780, Global Intelligent Industry Conference 2020, 117801O (18 March 2021); https://doi.org/10.1117/12.2590741

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available